Fabrication of planar, layered nanoparticles using tri-layer resist templates
نویسندگان
چکیده
منابع مشابه
Fabrication of wafer scale, aligned sub-25 nm nanowire and nanowire templates using planar edge defined alternate layer process
We have demonstrated a new planar edge defined alternate layer (PEDAL) process to make sub-25 nm nanowires across the whole wafer. The PEDAL process is useful in the fabrication of metal nanowires directly onto the wafer by shadow metallization and has the ability to fabricate sub-10 nm nanowires with 20 nm pitch. The process can also be used to make templates for the nano-imprinting with which...
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 2011
ISSN: 0957-4484,1361-6528
DOI: 10.1088/0957-4484/22/18/185302